Plasma assisted techniques for deposition of superhard nanocomposite coatings
نویسندگان
چکیده
منابع مشابه
Superhard nanocomposite coatings. From basic science toward industrialization*
A variety of superhard coatings with Vickers plastic hardness exceeding 40 GPa have been reported by several research groups during the last five years (for recent reviews see refs [1,2]). However, one has to distinguish between superhard nanocomposites, such as nc-TiN/a-Si3N4, nc-TiN/a-Si3N4/aand nc-TiSi2, nc-(Ti1-xAlx)N/a-Si3N4, nc-TiN/TiB2, ncTiN/BN, etc. where the high hardness originates f...
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A d.c. reactive magnetron sputtering technique was used to deposit (Ti, Si, Al)N films. The ion current density in the substrate was varied by the superimposition of an axially symmetric external magnetic field between the substrate and target. It was found that the variation of the magnetic field strength induced changes in the ion current density in the substrate with a consequent change in f...
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With the concept of digital factory, a research including experiment, kinetic Monte Carlo simulation, and ab initio calculation has been conducted to investigate the basic structure and the formation mechanism of Ti-Si-N superhard nanocomposite coatings. In sputtering PVD process, ion mass spectra and deposition rates have been measured. The measurement results show that the Ti-Si-N deposition ...
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 2007
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2006.08.113